Applications / References

H.E.T.-ANKE Filtertechnik GmbH
Dieselstraße 1
D-63674 Altenstadt

General Managers:
Uwe Hahmann, Erling Boller

T   +49 6047 9644 0
F   +49 6047 9644 44
E   info@het-filter.de

Semiconductor Industry

     

System type:                        A 1E-1 HSC
Volume flow rate:               1.200 m³/h
Type of dust:                        Arsen
Filter surface, level 1:        20 m²
Filter class, level 1:            H13
Filter surface, level 2:        20 m²
Filter class, level 2:            H13
Clean-gas value:                0,001 mg/m³
Dust discharge:                  Safe Change

Feature:                                Successfully completed
                                               containment measurements

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